MW Domestic Alternative Match Model: 702-1315-0803

Applicable Machine: Etch Process

Basic Parameters of Match:

a. RF Output Power: 1,500W, Frequency: 13.56MHz

b. RF Output: 3,000Vrms, 35Arms

c. DC Input: 24Vdc, 5A max

d. Weight: 4.5kg

Command Set: MW Format