MW Domestic Alternative Match Model: 705-40100-0305

Applicable Machine: PVD Process

Basic Parameters of Match:

a. RF Output Power: 10,000W, Frequency: 40.68MHz

b. RF Output: 5,000Vrms, 147Arms

c. DC Input: 1,200V, 60A

d. DC Output: 1,200V, 50A

e. Equipped with 13.56MHz Filter

f. DC Input: 24Vdc, 5A max

g. Weight: 18.0kg

h. Command Set: MW Format